{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties-Reference-Cited by-同舟云学术

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Published:2003-07 Issue:2 Volume:105 Page:162-170
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ledermann Nicolas,Muralt Paul,Baborowski Jacek,Gentil Sandrine,Mukati Kapil,Cantoni Marco,Seifert Andreas,Setter Nava

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

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4. Piezoelectric cantilever acoustic transducer;Lee;J. Micromech. Microeng.,1998

5. D.L. DeVoe, A.P. Pisano, in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers ’97), Chicago, 1997, pp. 1205–1208.

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