Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1148102
Reference35 articles.
1. Atomic Force Microscope
2. Atomic resolution imaging of a nonconductor by atomic force microscopy
3. Force measurement with a piezoelectric cantilever in a scanning force microscope
4. Micromachined atomic force microprobe with integrated capacitive read-out
5. Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
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