Tactile Sensor Using Micro-cantilever with BiFeO<sub>3</sub> Piezoelectric Film-Reference-Cited by-同舟云学术

Tactile Sensor Using Micro-cantilever with BiFeO₃ Piezoelectric Film

Published:2015 Issue:5 Volume:135 Page:158-164
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Mihara Masato¹,Nozawa Akito¹,Abe Takashi¹,Okuyama Masanori²,Noma Haruo³,Azuma Teruaki⁴,Sohgawa Masayuki¹

Affiliation:

1. Graduate School of Science and Technology, Niigata University

2. Institute for NanoScience Design, Osaka University

3. College of Information Science and Engineering, Ritsumeikan University

4. Novel Functional Devices Laboratory

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/135/5/135_158/_pdf

Reference34 articles.

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2. (3) C. Giancarlo, S. Stefano, and F. Carmelo : “Piezoresistive composite for robotic tactile applications”, Sensor and Actuators A, Vol. 208, No. 1, pp. 1-9 (2014)

3. (4) L. Lihua, D. Linjuan, and F. Guofang : “A 3D micro tactile sensor for dimensional metrology of micro structure with nanometer precision”, Measurement, Vol. 48, pp. 155-161 (2014)

4. (5) Y. M. Huang, M. Sohgawa, K. Yamashita, M. Okuyama, M. Noda, and H. Noma : “Fabrication and Normal/Shear Stress Response of Tactile Sensors of Polymer/Si Cantilevers Embedded in PDMS and Urethane Gel Elastomers”, IEEJ Trans. SM, Vol. 128, No. 5, pp. 193-197 (2008)

5. (6) H. Onishi, H. Tachibana, Y. Huang, M. Sohgawa, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, and H. Noma : “Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using NiCr Thin Film Gauge”, IEEJ Trans. SM, Vol. 129, No. 11, pp. 411-416 (2009)

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