A 3D micro tactile sensor for dimensional metrology of micro structure with nanometer precision-Reference-Cited by-同舟云学术

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A 3D micro tactile sensor for dimensional metrology of micro structure with nanometer precision

Published:2014-02 Issue: Volume:48 Page:155-161
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Lei Lihua,Deng Linjuan,Fan Guofang,Cai Xiaoyu,Li Yuan,Li Tongbao

Funder

Young Scientists Fund of the National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference10 articles.

1. Recent developments and challenges of nanopositioning and nanomeasuring technology;Manske;Meas. Sci. Technol.,2012

2. Dimensional micro and nano metrology;Hansen;Ann. CIRP,2006

3. Tactile-optical probes for three-dimensional microparts;Petz;Measurement,2012

4. Advances in traceable nanometrology at the national physical laboratory;Leach;Nanotechnology,2001

5. Modelling the mechanical behavior of bulk micromachined silicon accelerometers;van Kampen;Sens. Actuators A,1998

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