Publisher
Japan Society for Precision Engineering
Reference25 articles.
1. 1) JIS B 7440-1 : 2003:製品の幾何特性仕様 (GPS) ―座標測定機 (CMM) の受入検査及び定期検査―第1部:用語 (2003).
2. 2) A. Weckenmann, T. Estler, G. Peggs and D. McMurtry : Probing Systems in Dimensional Metrology, CIRP Annals, 53, (2004) 657.
3. 3) 佐藤理:マイクロ・メソスケール三次元形状測定技術の動向, 精密工学会誌, 74, 3 (2008) 217.
4. 4) K. Hidaka, H. -U. Danzebrink, H. Illers, A. Saito and N. Ishikawa : A high-resolution, self-sensing and self-actuated probe for micro-and nano-coordinate metrology and scanning force microscopy, CIRP Ann. Manuf. Technol., 59, (2010) 517.
5. 5) V. Nesterov and U. Brand : Modelling and investigation of the silicon twin design 3D micro probe, J. Micromech. Microeng., 15, (2005) 514.