Fabrication and Normal/Shear Stress Responses of Tactile Sensors of Polymer/Si Cantilevers Embedded in PDMS and Urethane Gel Elastomers

Author:

Huang Yu Ming1,Sohgawa Masayuki1,Yamashita Kaoru12,Kanashima Takeshi1,Okuyama Masanori1,Noda Minoru12,Noma Haruo3

Affiliation:

1. Department of Engineering Science, Osaka University

2. Graduate School of Science and Technology, Kyoto Insitute of technology

3. ATR Knowledge Science Labs

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference17 articles.

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2. (2) A. Bruce, I. Nourbakhsh, and R. Simmons : “The role of expressiveness and attention in human-robot interaction”, Proc. IEEE Int. Conf. Robo. Autom., Washington, DC, USA, pp. 4138-4142 (2002-5)

3. (3) F. Kanehiro, K. Kaneko, K. Fujiwara, K. Harada, S. Kajita, K. Yokoi, H. Hirukawa, K. Akachi, and T. Isozumi : “The first humanoid robot that has the same size as a human and that can lie down and get up”, Proc. IEEE Int. conf. Robo. Autom, Taipei, Taiwan, pp. 1633-1639 (2003)

4. (4) C.-C. Wen, C.-M. Lin, and W. Fang : “3-Axes tactile sensor with tunable sensing range”, Digest. Tech Pap, Transducer 07, Lyon, France, pp. 1457-1460 (2007-1)

5. (5) K. Noda, K. Hoshino, K. Matsumoto, and I. Shimoyama : “300nm-thick cantilever in PDMS for tactile sensing”, IEEE Micro Electro Mechanical Systems, Miami Beach, FL, USA, pp. 283-286 (2005-1,2)

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