Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices-Reference-Cited by-同舟云学术

Deposition and Characterization of Al₂O₃ and BiFeO₃ Thin Films on Titanium Substrates for Tough MEMS Devices

Published:2017 Issue:1 Volume:137 Page:46-47
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Kohno Takeshi¹,Mihara Masato¹,Tanabe Ataru¹,Abe Takashi¹,Okuyama Masanori²,Sohgawa Masayuki¹

Affiliation:

1. Graduate School of Science and Technology Niigata University

2. Institute for NanoScience Design, Osaka University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/137/1/137_46/_pdf

Reference7 articles.

1. (1) M. Sohgawa, K. Watanabe, T. Kanashima, M. Okuyama, H. Noma, and T. Azuma : “Review of Texture Measurement of Object Surface by Tactile Sensor with Inclined Micro-cantilevers”, IEEJ Trans. SM, Vol. 133, pp. 147-154 (2013)

2. (2) H. Yokoyama, T. Kanashima, M. Okuyama, T. Abe, H. Noma, T. Azuma, and M. Sohgawa : “Active Touch Sensing by Multi-axial Force Measurement Using High-Resolution Tactile Sensor with Microcantilevers”, IEEJ Trans. SM, Vol. 134, pp. 58-63 (2014)

3. (3) M. Mihara, A. Nozawa, T. Abe, M. Okuyama, H. Noma, T. Azuma, and M. Sohgawa : “Tactile Sensor Using Micro-cantilever with BiFeO₃ Piezoelectric Film”, IEEJ Trans. SM, Vol. 135, pp. 158-164 (2015)

4. (4) T. Kohno, T. Abe, M. Okuyama, H. Noma, and M. Sohgawa : “Characterization of BiFeO₃ Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge”, IEEE Sensors 2015, Busan, Korea (2015)

5. (5) M. P. Rao, M. F. Aimi, and N. C. MacDonald : “Bulk micromachined titanium micro mirror device with sloping electrode geometry”, 2004 Solid-State Sensor, Actuator, and Microsystems Workshop, SC USA (2004)