UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass
Author:
Affiliation:
1. Faculty of Science and Technology, Department of Applied Physics and Physico-Informatics, Keio University.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/123/11/123_11_499/_pdf
Reference9 articles.
1. (1) H. P. Herzig:“MICRO-OPTICS”, Taylor & Francis, pp. 140-142 (1997)
2. (2) W. Daschner, P. Long, R. Stein, C. Wu, and S. H. Lee:“Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy sensitive glass”, Applied Optics, Vol. 36 No. 8, pp. 4675-4680 (1997)
3. (3) G. Kanomata and Y. Matsumoto:“3-D Micro Machining of Photo Sensitive Glass Using Gray-Scale Mask”, T. IEE Japan, Vol. 122-E, No. 11, pp. 531-536 (2002-11) (in Japanese)
4. 鹿又 学, 松本佳宣：「グレイスケールマスクを用いたガラスの三次元微細加工技術」,電学論誌E, 122 11, pp. 531-536 (2002-11)
5. (4) T. Matsuura:“Photo Chemically Machinable Glass Ceramics”, Jitsumu Hyoumen Gijutsu, Vol. 35 No. 11, pp 1-7 (1998-11) (in Japanese)
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3. Three Dimensional Micro Fabrication of Photoresist and Resin Materials by Using Gray-scale Lithography and Molding;IEEJ Transactions on Sensors and Micromachines;2004
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