Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass
Author:
Publisher
The Optical Society
Reference12 articles.
1. Recent advances in computer generated hologram applications
2. One-step 3D shaping using a gray-tone mask for optical and microelectronic applications
3. Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluation
4. Fabrication of diffractive optical elements using a single optical exposure with a gray level mask
5. Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step
Cited by 104 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Multilevel Spiral Axicon for High-Order Bessel–Gauss Beams Generation;Nanomaterials;2023-01-31
2. Diffractive optical elements 75 years on: from micro-optics to metasurfaces;Photonics Insights;2023
3. 衍射光学元件设计方法综述;Acta Optica Sinica;2023
4. 超快激光制备硫系玻璃表面周期性纳米结构;Laser & Optoelectronics Progress;2022
5. Design and analysis of thin optical lens composed of low-index subwavelength structures;Applied Optics;2019-06-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3