Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step-Reference-Cited by-同舟云学术

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Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step

Published:1995-05-10 Issue:14 Volume:34 Page:2534
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Däschner Walter,Larsson Michael,Lee S. H.

Publisher

The Optical Society

Reference23 articles.

1. Two-dimensional array of diffractive microlenses fabricated by thin film deposition

2. Photolithographic fabrication of thin film lenses

3. Deep three-dimensional microstructure fabrication for infrared binary optics

4. Fabricating binary optics: Process variables critical to optical efficiency

5. Fabrication of micro lenses using electron-beam lithography

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4. Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond;Advanced Materials;2018-01-24

5. Continuous-relief diffractive microlenses for laser beam focusing;Optics Express;2017-10-20

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