Funder
Russian Science Foundation
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Allmen, M.: Blatter. In: Andreas laser-beam interactions with materials, physical prinicples and applications, 2nd edn., pp. 131–134. Springer, Berlin, Heidelberg (1995)
2. Bay, C., Freeman, J., Hübner, N., Wilkinson, T.: Maskless photolithography via holographic optical projection. Opt. Lett. 35(13), 2230–2232 (2010). https://doi.org/10.1364/OL.35.002230
3. Born, M., Wolf, E., Bhatia, A.B., Clemmow, P.C., Gabor, D., Stokes, A.R., Taylor, A.M., Wayman, P.A., Wilcock, W.L.: Principles of optics. Cambridge University Press (1999)
4. Däschner, W., Larsson, M., Lee, S.H.: Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step. Appl. Opt. 34(14), 2534–2539 (1995). https://doi.org/10.1364/AO.34.002534
5. Gorbunov, A.A., Eichler, H., Pompe, W., Huey, B.: Lateral self-limitation in the laser-induced oxidation of ultrathin metal films. Appl. Phys. Lett. 69, 2816–2818 (1996). https://doi.org/10.1063/1.116853
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献