Maskless photolithography via holographic optical projection
Author:
Funder
Alps Electric Co., Ltd.
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference16 articles.
1. SLM-based maskless lithography for TFT-LCD
2. Optical proximity correction for a versatile LCD based direct write maskless photoplotter
3. Three-dimensional parallel holographic micropatterning using a spatial light modulator
4. Holographic microlithography
5. Nonplanar photolithography with computer-generated holograms
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