Affiliation:
1. Ritsumeikan University
2. OMRON Corporation
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference8 articles.
1. RF MEMS from a device perspective
2. (2) G. M. Rebeiz : “RF MEMS: Theory, Design, and Technology”, John Wiley & Sons Inc. (2002)
3. (3) H. Schlaak, F. Arndt, J. Schimkat, and M. Hanke : “Silicon microrelay with electrostatic moving wedge actuator”, 5th International conference on microelectrooptomechanical systems and components, MST'96, pp. 463-468 (1996)
4. Micromechanical switches fabricated using nickel surface micromachining
5. (5) W. P. Taylor and M. G. Allen : “Integrated magnetic microrelays: Normally open, normally closed, and multi-pole devices”, 1997 International Conference on Solid-State Sensors and Actuators (Transducers'97), pp. 1149-1152 (1997)
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献