Integrated Shunt-type MEMS Switch with a Submicron Narrow Gap

Author:

Yamamoto Shoji1,Maeda Kazuya1,Suzuki Kenichiro1

Affiliation:

1. College of Science and Engineering, Ritsumeikan University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference20 articles.

1. (1) G. M. Rebeiz : “RF-MEMS: Theory, Design, and Technology”, pp. 1-2 (2002)

2. Micromechanical Membrane Switches on Silicon

3. (3) J. J. Yao and M. F. Chang : “A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC up to 4 GHz”, Proc. Transducers 1995, Vol. 2, pp. 384-387 (1995)

4. (4) C. L. Goldsmith, T. H. Lin, B. Powers, W. R. Wu, and B. Norvell : “Micromechanical Membrane Switches for Microwave Applications”, Digest of IEEE Int. Microwave Symposium, Vol. 1, pp. 91-94 (1995)

5. Performance of low-loss RF MEMS capacitive switches

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