Development of Electrostatic Actuator, which enables the Stable Contact Resistance, Driven at Low Voltage

Author:

Masuda Takahiro1,Seki Tomonori1,Miyaji Takaaki1,Sato Fumihiko1

Affiliation:

1. Advanced Device Laboratry, Corporate R&D H. Q. Omron Corporation

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference7 articles.

1. (1) G. M. Rebeiz : “RF MEMS:Theory, Design, and Technology”, John Wiley & Sons Inc. (2002)

2. (2) H. Schlaak, F. Arndt, J. Schimkat, and M. Hanke : “Silicon microrelay with electrostatic moving wedge actuator”, 5th International conference on micro electro mechanical systems and components, MST'96, pp. 463-468 (1996)

3. Micromechanical switches fabricated using nickel surface micromachining

4. (4) W. P. Taylor and M. G. Allen : “Integrated magnetic microrelays: Normally open, normally close, and multi-pole devices”, 1997 International Conference on Solid-State Sensors and Actuators (Transducers'97), pp. 1149-1152 (1997)

5. (5) D. C. Miller, W. Zhang, and V. M. Bright : “Microrelay packaging technology using Flip-chip assembly”, The 13th IEEE International Micro Electro Mechanical Systems Conference (MEMS'00), pp. 265-270 (2000)

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