Micromachining of Titanium using a Desktop DRIE
Author:
Affiliation:
1. Graduate School of Science and Technology, Niigata University
2. Tateyama Machine Co., LTD.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/134/4/134_96/_pdf
Reference12 articles.
1. (1) C. A. Biffi and N. Lecis : “Fiber laser microdrilling of Titanium and its effect on material microstructure”, International Journal of Advanced Manufacturing Technology, Vol. 54, pp. 149-160 (2011)
2. (2) S. Çelen : “Laser micro-machined semi-slinky like MEMS structures: Novel interface coolers”, Optics & Laser Technology, Vol. 44, pp. 2043-2048 (2012)
3. (3) T. Sjöström and B. Su : “Micropatterning of titanium surfaces using electrochemical micromachining with an ethylene glycol electrolyte”, Materials Letters, Vol. 65, pp. 3489-3492 (2011)
4. (4) C. Madore : “Through-Mask Electrochemical Micromachining of Titanium”, Journal of The Electrochemical Society, Vol. 146, No. 7, pp. 2526-2532 (1999)
5. (5) M. F. Aimi, M. P. Rao, and N. C. Macdonald : “High-Aspect-Ratio bulk micromachining of titanium”, Nature Materials, Vol. 3, pp. 103-105 (2004)
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