Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Feynman RP. There is plenty of room at the bottom, 〈http://calteches.library.caltech.edu/1976/1/1960Bottom.pdf〉, 22–36, 1960.
2. Bishop D, Heuer A, Williams D. Microelectromechanical systems: technology and applications, MRS Bulletin, (2001).
3. Laser Precision Micro Fabrication;Sugioka,2010
4. Materials issues in microelectromechanical systems (MEMS);Spearing;Acta Materialia,2000
5. Alting L, Kimura F, Hansen H.N, Bissacco G. Micro Engineering, CIRP Annals, Vol. 52/2/2003, pp. 635–658, 2003.
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