FPD Exposure System and Precision Servo Technology
Author:
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Link
https://www.jstage.jst.go.jp/article/ieejjournal/137/1/137_19/_pdf
Reference11 articles.
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2. (2) 涌井伸二：「精密位置決めにおけるアクティブ除振装置の役割」，精密工学会誌，Vol. 73, No. 4, pp. 405-409 (2007)
3. (3) K. Sakata, H. Fujimoto, A. Hara, T. Ohtomo, and K. Saiki：“Design Fabrication and Control of 4-DOF High-Precision Stage”, in Proc. IEEE AMC, pp. 366-370 (2010)
4. (4) K. Sakata, H. Asaumi, K. Hirachi, K. Saiki, and H. Fujimoto：“Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage”, IEEJ Trans. I A, Vol. 3, No. 6, pp. 455-462 (2014)
5. (5) T. Atsumi, T. Arisaka, T. Shimizu, and T. Yamaguchi：“Vibration Servo Control Design for Mechanical Resonant Modes of a Hard-Disk-Drive Actuator”, JSME International Journal Series C, Vol. 46, No. 3, pp. 819-829 (2003)
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