Frequency response data-based peak filter design applied to MIMO large-scale high-precision scan stage

Author:

Mae MasahiroORCID,Ohnishi Wataru,Fujimoto HiroshiORCID,Sakata Koichi,Hara Atsushi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference37 articles.

1. Advanced motion control for precision mechatronics: Control, identification, and learning of complex systems;Oomen;IEEE J Ind Appl,2018

2. Self resonance cancellation techniques for a two-mass system and its application to a large-scale stage;Sakata;IEEE J Ind Appl,2014

3. Perfect tracking control based on multirate feedforward control with generalized sampling periods;Fujimoto;IEEE Trans Ind Electron,2001

4. MIMO Multirate feedforward controller design with selection of input multiplicities and intersample behavior analysis;Mae;Mechatronics,2020

5. Position control in lithographic equipment [applications of control];Butler;IEEE Control Syst,2011

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1. Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage;IEEE/ASME Transactions on Mechatronics;2024-08

2. Optimized High Precision Motion Controller Design Against Plant Perturbations Based on Integrated Frequency Response Data;IEEE/ASME Transactions on Mechatronics;2024-08

3. Repetitive positioning control for DISO systems by adaptive feed-forward cancellation;2024 IEEE International Conference on Advanced Intelligent Mechatronics (AIM);2024-07-15

4. A New Stability Index for Industrial Servo Systems Using Frequency Response Function Considering Measurement Delay and Noise;2022 22nd International Conference on Control, Automation and Systems (ICCAS);2022-11-27

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