Frequency response data-based peak filter design applied to MIMO large-scale high-precision scan stage
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Reference37 articles.
1. Advanced motion control for precision mechatronics: Control, identification, and learning of complex systems;Oomen;IEEE J Ind Appl,2018
2. Self resonance cancellation techniques for a two-mass system and its application to a large-scale stage;Sakata;IEEE J Ind Appl,2014
3. Perfect tracking control based on multirate feedforward control with generalized sampling periods;Fujimoto;IEEE Trans Ind Electron,2001
4. MIMO Multirate feedforward controller design with selection of input multiplicities and intersample behavior analysis;Mae;Mechatronics,2020
5. Position control in lithographic equipment [applications of control];Butler;IEEE Control Syst,2011
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1. A New Stability Index for Industrial Servo Systems Using Frequency Response Function Considering Measurement Delay and Noise;2022 22nd International Conference on Control, Automation and Systems (ICCAS);2022-11-27
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