Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage-Reference-Cited by-同舟云学术

Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage

Published:2014 Issue:6 Volume:3 Page:455-462
ISSN:2187-1094
Container-title:IEEJ Journal of Industry Applications
language:en
Short-container-title:IEEJ Journal IA

Author:

Sakata Koichi¹,Asaumi Hiroyoshi¹,Hirachi Kazuyuki¹,Saiki Kazuaki¹,Fujimoto Hiroshi²

Affiliation:

1. Nikon Corporation

2. The University of Tokyo

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering,Energy Engineering and Power Technology,Automotive Engineering

Link

https://www.jstage.jst.go.jp/article/ieejjia/3/6/3_455/_pdf

Reference14 articles.

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2. (2) K. Saiki, A. Hara, K. Sakata, and H. Fujimoto: “A study on high-speed and high-precision tracking control of large-scale stage using perfect tracking control method based on multirate feedforward control”, IEEE Trans. Ind. Electron., Vol. 57, No. 4, pp. 1393-1400 (2010)

3. (3) T. Atsumi, T. Arisaka, T. Shimizu, and T. Yamaguchi: “Vibration servo control design for mechanical resonant modes of a hard-disk-drive actuator”, JSME Int. J. Ser. C, Vol. 46, No. 3, pp. 819-827 (2003)

4. (4) K. Seki, H. Matsuura, M. Iwasaki, and H. Hirai: “High-precision positioning by structural design using vibration node”, in Proc. IEEE IECON, pp. 1896-1901 (2010)

5. (5) A. Hara, K. Saiki, K. Sakata, and H. Fujimoto: “Basic examination on simultaneous optimization of mechanism and control for high precision single axis stage and experimental verification”, in Proc. IEEE IECON, pp. 2509-2514 (2008)

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