Author:
Prakasam Vittal,Saseendran Sandeep Seema,Humbert Aurélie,Monroy Isabel Pintor,Berghmans Francois,Baines Yannick,Qiu Huaqing,Karve Gauri,Soussan Philippe
Abstract
Germanium photodiodes integrated via selective epitaxial growth typically have low detectivity. We demonstrate process approaches that are needed to minimize defectivity in germanium, thereby paving way towards photodiodes with low dark current and high detectivity.