High-efficiency MoRu–Be multilayer-coated gratings operating near normal incidence in the 111–120-nm wavelength range
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The Optical Society
Reference15 articles.
1. Polarization and efficiency of a concave multilayer grating in the 135–250-Å region and in normal-incidence and Seya–Namioka mounts
2. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region
3. The potential for plasma diagnostics from stellar extreme-ultraviolet observations
4. Mo/Si and Mo/Be multilayer thin films on Zerodur substrates for extreme-ultraviolet lithography
5. On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136–142-Å wavelength region and near normal incidence
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