Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency
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Publisher
The Optical Society
Reference28 articles.
1. Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm grating
2. Efficiency and long-term stability of a multilayer-coated, ion-etched blazed holographic grating in the 125–133-Å wavelength region
3. Polarization and efficiency of a concave multilayer grating in the 135–250-Å region and in normal-incidence and Seya–Namioka mounts
4. Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 145–160-nm wavelength region
5. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region
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