Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 145–160-nm wavelength region-Reference-Cited by-同舟云学术

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Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 145–160-nm wavelength region

Published:1997-06-01 Issue:11 Volume:22 Page:834
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Kowalski M. P.,Cruddace R. G.,Seely J. F.,Rife J. C.,Heidemann K. F.,Heinzmann U.,Kleineberg U.,Osterried K.,Menke D.,Hunter W. R.

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference14 articles.

1. Molybdenum-silicon multilayer mirrors for the extreme ultraviolet

2. Multilayer mirror technology for soft-x-ray projection lithography

3. Electron-beam-deposited Mo/Si and MoxSiy/Si multilayer x-ray mirrors and gratings

4. �ber rasterf�rmige Reflexionsgitter

5. Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm grating

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1. XUV gratings based on holography;Advances in X-Ray/EUV Optics and Components XV;2020-08-21

2. Analytic theory of alternate multilayer gratings operating in single-order regime;Optics Express;2017-06-28

3. High-efficiency B_4C/Mo_2C alternate multilayer grating for monochromators in the photon energy range from 07 to 34 keV;Optics Letters;2014-03-31

4. SiC/W/Ir multilayer-coated grating for enhanced efficiency in 50–100 nm wavelength range in Seya–Namioka mount;Optics Letters;2011-01-07

5. Investigation on the properties of a laminar grating as a soft x-ray beam splitter;Applied Optics;2010-08-06

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