Fabrication of high-efficiency and low-stray-light grating by inductively coupled plasma(ICP) etching-polishing method
Author:
Funder
863 Program of China
Ministry of Science and Technology (MOST)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference13 articles.
1. Electromagnetic scattering from perfectly conducting rough surfaces (a new full wave method)
2. A note on the theory of scattering from an irregular surface
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4. Investigation of the properties of an ion-etched plane laminar holographic grating
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1. Fabrication of a large computer-generated hologram with high diffraction efficiency and high accuracy by scanning homogenization etching;Optics Express;2023-12-21
2. Investigation on charged particles in inductively coupled Ar/O2 plasmas: The role of Ar proportion;Physics of Plasmas;2022-11
3. Low-stray-light gratings fabricated with scanning exposure method based on Lloyd’s mirror for a high-contrast near-eye display in augmented reality;Applied Optics;2022-06-21
4. Design of a High-Efficiency Multilayer Dielectric Diffraction Grating with Enhanced Laser Damage Threshold;Nanomaterials;2022-06-07
5. Scanning ion beam etching: A method for the fabrication of computer-generated hologram with nanometric accuracy for aspherical testing;Optics and Lasers in Engineering;2021-04
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