Spectral separation of the efficiencies of the inside and outside orders of soft-x-ray-extreme-ultraviolet gratings at near normal incidence
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2359224
Reference32 articles.
1. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region
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4. Extreme ultraviolet optical constants for the design and fabrication of multilayer-coated gratings
5. Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements
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