Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography
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The Optical Society
Reference20 articles.
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1. Blazed gratings with both controllable blaze angle and anti-blaze angle fabricated by using a twice oblique ion beam etching method;Applied Optics;2022-11-16
2. Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar 2 -CHF 3 ion-beam etching through a rectangular photoresist mask;International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies;2011-06-09
3. It's time for a new EUV orbital mission;Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray;2010-07-16
4. Broadband multilayer-coated normal incidence blazed grating with ~10% diffraction efficiency through the 13-16 nm wavelength region;Optics Letters;2009-03-11
5. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region;Chinese Optics Letters;2009
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