Microstructure of Mo/Si multilayers with B_4C diffusion barrier layers
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Publisher
The Optical Society
Reference14 articles.
1. Progress in Mo/Si multilayer coating technology for EUVL optics
2. Thermally enhanced interdiffusion in Mo∕Si multilayers
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4. Improved reflectance and stability of Mo-Si multilayers
5. Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors
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