Improved reflectance and stability of Mo-Si multilayers
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference35 articles.
1. Molybdenum-silicon multilayer mirrors for the extreme ultraviolet
2. Fabrication of high‐reflectance Mo–Si multilayer mirrors by planar‐magnetron sputtering
3. High‐resolution electron microscopy study of x‐ray multilayer structures
4. Interfacial reactions on annealing molybdenum‐silicon multilayers
5. Optical constants from the far infrared to the x-ray region: Mg, Al, Cu, Ag, Au, Bi, C, and Al_2O_3
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