Thermally enhanced interdiffusion in Mo∕Si multilayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2907964
Reference20 articles.
1. First performance results of the ASML alpha demo tool
2. Thermal stability of soft x-ray Mo–Si and MoSi_2-Si multilayer mirrors
3. Interfacial reactions and thermal stability of ultrahigh vacuum deposited multilayered Mo/Si structures
4. Temperature-dependent nanocrystal formation inMo∕Simultilayers
5. Silicide layer growth rates in Mo/Si multilayers
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