Optical and structural performance of the Al(1%wtSi)/Zr reflection multilayers in the 17

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Optical and structural performance of the Al(1%wtSi)/Zr reflection multilayers in the 17–19nm region

Published:2012-04-24 Issue:10 Volume:20 Page:10692
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Zhong Qi,Li Wenbin,Zhang Zhong,Zhu Jingtao,Huang Qiushi,Li Haochuan,Wang Zhanshan,Jonnard Philippe,Le Guen Karine,André Jean-Michel,Zhou Hongjun,Huo Tonglin

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference22 articles.

1. EUV multilayers for solar physics

2. Capped Mo/Si multilayers with improved performance at 304 nm for future solar missions

3. Improved reflectance and stability of Mo-Si multilayers

4. Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications

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1. Al/Zr-based multilayer mirrors with record-breaking reflectivity;Optics Letters;2024-08-08

2. Optical and structural performance of the Mo/Al (1.5wt. % Si) reflection multilayers at 58.4 nm;Optical Engineering;2024-07-03

3. Ultrasmooth Ti/Al multilayer with a Ti seed layer for EUV applications;Optical Materials Express;2024-06-06

4. Development of a narrowband multilayer mirror for extracting a single order component from high harmonics in the 63–70 eV region;Applied Optics;2024-05-31

5. Narrowband Mg/SiC multilayer mirror working as high-harmonic selector at 30.4 nm wavelength;Journal of Optics;2024-04-11

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