Author:
Saleh Bahaa E. A.,Nashold Karen M.
Cited by
16 articles.
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1. Resolution Enhancement Techniques and Mask Data Preparation;Electronic Design Automation for IC Implementation, Circuit Design, and Process Technology;2016-04-14
2. High-resolution proximity lithography for nano-optical components;Microelectronic Engineering;2015-01
3. Fast pixel-based mask optimization for inverse lithography;Journal of Micro/Nanolithography, MEMS, and MOEMS;2006-10-01
4. Solving inverse problems of optical microlithography;Optical Microlithography XVIII;2005-05-12
5. Advanced Optical Masks;Handbook of Photomask Manufacturing Technology;2005-04-07