High-resolution proximity lithography for nano-optical components-Reference-Cited by-同舟云学术

High-resolution proximity lithography for nano-optical components

Published:2015-01 Issue: Volume:132 Page:120-134
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Stuerzebecher Lorenz,Fuchs Frank,Zeitner Uwe D.,Tuennermann Andreas

Funder

German Ministry of Science and Education

Fertigungstechnologien für hoch entwickelte Mikro- und Nanooptiken

Ministry for Education, Sciences and Culture of Thuringia

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference190 articles.

1. An Optical Problem, Proposed by Mr. Hopkinson, and Solved by Mr. Rittenhouse

2. Kurzer Bericht von den Resultaten neuerer Versuche über die Gesetze des Lichtes, und die Theorie derselben

3. Recent Improvements in Diffraction Gratings and Replicas

4. Bright Diffraction Gratings*

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Holographic Lithography Techniques (Invited);CHIN J LASERS;2024

2. Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates;Micro and Nano Engineering;2024-06

3. A Large-area Nanograting as SERS Substrate by Displacement Talbot Lithography;2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2023-07-31

4. Generation of multiple focal pattern via phase modulated radial and azimuthal variant vector beam;Optical and Quantum Electronics;2023-03-07

5. Generation of light sheet focal patterns for light-sheet fluorescence microscopy via phase modulated radial and azimuthal variant vector beam;2022-11-01