Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography-Reference-Cited by-同舟云学术

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Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

Published:2012-11-07 Issue:22 Volume:37 Page:4651
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Stehlin Fabrice,Bourgin Yannick,Spangenberg Arnaud,Jourlin Yves,Parriaux Olivier,Reynaud Stéphanie,Wieder Fernand,Soppera Olivier

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference17 articles.

1. Large-Area Nanoscale Patterning: Chemistry Meets Fabrication

2. Semiconductor Nanowires: From Self-Organization to Patterned Growth

3. Patterning surfaces with functional polymers

4. Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol–gel route

5. Chemically amplified photoresists for 193-nm photolithography: Effect of molecular structure and photonic parameters on photopatterning

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2. Fabrication of High-? Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions;ACS APPL MATER INTER;2022

3. Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions;ACS Applied Materials & Interfaces;2022-07-07

4. Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning;Nanomaterials;2022-07-07

5. 3D printing of optical materials by processes based on photopolymerization: materials, technologies, and recent advances;Photonics Research;2022-05-12

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