Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions-Reference-Cited by-同舟云学术

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Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions

Published:2022-07-07 Issue:28 Volume:14 Page:32729-32737
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Yadav Pravind¹^ORCID,Gatensby Riley¹,Prochukhan Nadezda¹^ORCID,C. Padmanabhan Sibu¹,Davó-Quiñonero Arantxa¹,Darragh Philip¹,Senthamaraikannan Ramsankar¹,Murphy Bríd¹,Snelgrove Matthew²^ORCID,McFeely Caitlin²^ORCID,Singh Sajan¹,Conway Jim³,O’Connor Robert²,McGlynn Enda²³,Lundy Ross¹^ORCID,Morris Michael A.¹^ORCID

Affiliation:

1. AMBER Research Centre and School of Chemistry, Trinity College Dublin, Dublin 2, Ireland

2. School of Physical Sciences, Dublin City University, Glasnevin, Dublin 9, Ireland

3. National Centre for Plasma Science and Technology, Dublin City University, Glasnevin, Dublin 9, Ireland

Funder

Science Foundation Ireland

European Regional Development Fund

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.2c07966

Reference46 articles.

1. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

2. Englard, I.; Stegen, R.; Vanoppen, P.; Minnaert-Janssen, I.; der Kinderen, T.; van Brederode, E.; Duray, F.; Linders, J.; Ovchinnikov, D.; Piech, R.; Masia, C.; Hillel, N.; Ravid, E.; Rotlevi, O.; Wilde, A.; Shabtay, S.; Telor, Z.; Schreutelkamp, R. Novel Approach for Immersion Lithography Defectivity Control to Increase Productivity. Metrology, Inspection, and Process Control for Microlithography XXII, 2008; Vol. 6922, p 69223U.

3. Promising Lithography Techniques for Next-Generation Logic Devices

4. Miniaturization of electronics and its limits

5. Advancement and challenges in MOSFET scaling

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of sub-5 nm uniform zirconium oxide films on corrugated copper substrates by a scalable polymer brush assisted deposition method;Applied Surface Science;2023-08

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