Efficient pulse amplification using a transverse-flow CO_2 laser for extreme ultraviolet light source

Author:

Tanino Yoichi,Yamamoto Tatsuya,Nishimae Junichi,Fujikawa Shuichi

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021

2. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021

3. Multiline oscillation of Q-switched cavity-dumped CO2 laser with intracavity diffraction grating;Laser Resonators, Microresonators, and Beam Control XXII;2020-03-02

4. Key components development progress updates of the 250W high-power LPP-EUV light source;Extreme Ultraviolet (EUV) Lithography IX;2018-03-19

5. Key components development progress updates of the 250W high power LPP-EUV light source;International Conference on Extreme Ultraviolet Lithography 2017;2017-10-16

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