Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope
2. Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry
3. Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope
4. Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer
5. Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer
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