Scanning interferometric phase-calculation formula for simultaneous topographic profiling of thickness and surface of optical flats
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Revisiting Newton’s rings with a plasmonic optical flat for high-accuracy surface inspection;Zheng;Light Sci. Appl.,2016
4. Physical thickness and group refractive index measurement of individual layers for double-stacked microstructures using spectral-domain interferometry;Park;Opt. Commun.,2019
5. A review of thickness measurements of thick transparent layers using optical interferometry;Park;Int. J. Precis. Eng.,2019
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