Surface profile measurement of transparent parallel plates by multi-scale analysis phase-shifting interferometry (MAPSI)-Reference-Cited by-同舟云学术

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Surface profile measurement of transparent parallel plates by multi-scale analysis phase-shifting interferometry (MAPSI)

Published:2024-10 Issue: Volume:181 Page:108432
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Ding Yifan^ORCID,Lu Qi^ORCID,Liu Shijie,Zhang Xu,Chen Dapeng,Shao Jianda

Publisher

Elsevier BV

Reference34 articles.

1. Optical shop testing;Malacara,2007

2. Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics;Kim;Opt Express,2008

3. Simultaneous thickness and group index measurement with a single arm low-coherence interferometer;Zilio;Opt Express,2014

4. Fourier-transform phase-shifting interferometry;Deck;Appl Opt,2003

5. Tunable phase-extraction formulae for simultaneous shape measurement of multiple surfaces with wavelength-shifting interferometry;Hibino;Opt Express,2004

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