Optical and compositional properties of amorphous silicon-germanium films by plasma processing for integrated photonics-Reference-Cited by-同舟云学术

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Optical and compositional properties of amorphous silicon-germanium films by plasma processing for integrated photonics

Published:2012-03-02 Issue:4 Volume:2 Page:358
ISSN:2159-3930
Container-title:Optical Materials Express
language:en
Short-container-title:Opt. Mater. Express

Author:

Hernández-Montero William W.,Zaldívar-Huerta Ignacio E.,Zúñiga-Islas Carlos,Torres-Jácome Alfonso,Reyes-Betanzo Claudia,Itzmoyotl-Toxqui Adrián

Publisher

The Optical Society

Subject

Electronic, Optical and Magnetic Materials

Reference30 articles.

1. The Past, Present, and Future of Silicon Photonics

2. Silicon-Based Plasmonics for On-Chip Photonics

3. Longwave plasmonics on doped silicon and silicides

4. β-SiC-on insulator waveguide structures for modulators and sensor systems

5. Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition

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1. Mid-infrared emission of germanium-tin films produced by sputtering;Journal of Vacuum Science & Technology B;2024-03-01

2. Effect of thermodynamic parameters on properties of silicon-carbon films prepared by radio-frequency plasma-enhanced chemical vapor deposition for anti-reflective and photo-luminescent coatings;Journal of Vacuum Science & Technology B;2021-07

3. Design and simulation of a piezoelectric transducer by finite element;Revista de Simulación y Laboratorio;2021-06-30

4. Micro-combinatorial sampling of the optical properties of hydrogenated amorphous $$\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}$$ for the entire range of compositions towards a database for optoelectronics;Scientific Reports;2020-11-06

5. FDTD investigation on compact and wideband optical integration between Si3N4 and Ge-based waveguide devices via amorphous Si and GeSi lateral tapers;Results in Physics;2020-09

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