Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition-Reference-Cited by-同舟云学术

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Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition

Published:2007-08-16 Issue: Volume:2 Page:
ISSN:1990-2573
Container-title:Journal of the European Optical Society: Rapid Publications
language:en
Short-container-title:JEOS:RP

Author:

Sabac A.,Gorecki C.,Jozwik M.,Nieradko L.,Meunier C.,Gut K.

Publisher

European Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synthesis of a Novel Polyethoxysilsesquiazane and Thermal Conversion into Ternary Silicon Oxynitride Ceramics with Enhanced Thermal Stability;Materials;2017-12-05

2. Optical and compositional properties of amorphous silicon-germanium films by plasma processing for integrated photonics;Optical Materials Express;2012-03-02

3. A suggestion of utilizing bimodal layers of the polymer SU8 for the purpose of monitoring the changes in the refractive index;OPT APPL;2012

4. The Waveguide Structure Based on the Polymer SU8 on a SiO2/Si Substrate;Acta Physica Polonica A;2011-10

5. Differential interference in a polymer waveguide;Bulletin of the Polish Academy of Sciences: Technical Sciences;2011-01-01

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