Reflection coefficient monitoring for optical interference coating depositions
Author:
Funder
National Science Council of Taiwan
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference8 articles.
1. Error Compensation Mechanisms in Some Thin-film Monitoring Systems
2. Optical monitoring of nonquarterwave stacks
3. Turning Value Monitoring of Narrow-band All-dielectric Thin-film Optical Filters
4. In situ sensitive optical monitoring with proper error compensation
5. Advanced broadband monitoring for thin film deposition through equivalent optical admittance loci observation
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1. An optical monitoring method for depositing dielectric layers of arbitrary thickness using reciprocal of transmittance;Optics Express;2015-02-13
2. Thin Film Optical Coatings;Topics in Applied Physics;2014-11-26
3. On-chip copper–dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors;Applied Optics;2014-07-08
4. Analysis of the thickness uniformity improved by using wire masks for coating optical bandpass filters;Applied Optics;2014-02-28
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