Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm-Reference-Cited by-同舟云学术

Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm

Published:2022-05-18 Issue:11 Volume:30 Page:19332
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Polkovnikov V. N.¹,Shaposhnikov R. A.¹,Zuev S. Yu.¹,Svechnikov M. V.¹,Sertsu M. G.²^ORCID,Sokolov A.²,Schäfers F.²,Chkhalo N. I.¹

Affiliation:

1. The Institute for Physics of Microstructures of the Russian Academy of Sciences

2. BESSY-II, Albert-Einstein-Str

Abstract

The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that the deposition of B4C barrier layers onto Y layers makes it possible to significantly increase the reflection coefficient compared to structures without barrier layers. A reflectance of 54% was obtained for mirrors optimized for 11.4 nm, which is close to the theoretical limit for these materials.

Funder

Ministerstwo Edukacji i Nauki

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

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