Molybdenum–strontium multilayer mirrors for the 8–12-nm extreme-ultraviolet wavelength region
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference4 articles.
1. Extreme ultraviolet lithography
2. The potential for plasma diagnostics from stellar extreme-ultraviolet observations
3. Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region
4. Ultrahigh vacuum deposition–reflectometer system for the in situ investigation of Y/Mo extreme-ultraviolet multilayer mirrors
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