Effects of interface-engineering on the internal structure and reflective characteristics of Cr/Sc multilayer mirrors

Abstract

Record reflectivity’s of REXP=23.8% at 3.14 nm and RCALC=30.8% at 3.12 nm have been obtained for Cr/Sc mirrors. Such increases in reflection are the result of decreases in mixing of the system layers with each other due to the use of interface-engineering methods – passivation of the already deposited Cr layer with nitrogen before deposition of the subsequent Sc layer. However, it has been found that adding additional B4C layers to such a system leads to a decrease in reflectivity.