Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy
Author:
Funder
U.S. Department of Energy (DOE)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference28 articles.
1. Optimization of laser-damage resistance of evaporated hafnia films at 351nm
2. Review on high-k dielectrics reliability issues
3. Charge-transition levels of oxygen vacancy as the origin of device instability in HfO2 gate stacks through quasiparticle energy calculations
4. Transient phenomena in the dielectric breakdown of HfO2 optical films probed by ultrafast laser pulse pairs
5. Modeling the effect of native and laser-induced states on the dielectric breakdown of wide band gap optical materials by multiple subpicosecond laser pulses
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