Antireflection coating with consistent near-neutral color on complex-shaped substrates prepared by ALD
Author:
Funder
Fraunhofer-Gesellschaft (Fraunhofer)
Carl-Zeiss-Stiftung
Deutsche Forschungsgemeinschaft (DFG)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Wideband antireflection coatings by combining interference multilayers with structured top layers
2. Antireflection coatings combining interference multilayers and a nanoporous MgF2 top layer prepared by glancing angle deposition
3. Substrate-rotation systems and productivity of industrial PVD processes
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