Substrate-rotation systems and productivity of industrial PVD processes
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference4 articles.
1. PVD equipment design: concepts for increased production throughput;Stevenson;Surf. Coat. Technol.,1995
2. Fundamental economical aspects of functional coatings for tribological applications;Friedrich;Surf. Coat. Technol.,1998
3. On the possibility of physical vapour deposition process design by coordinated substrate rotation modes;Rother;Surf. Coat. Technol.,1994
4. Multilayer hard coatings by coordinated substrate rotation modes in industrial PVD deposition systems;Rother;Surf. Coat. Technol.,1996
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