Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering: A comparative study between Monte Carlo modelling and experiments-Reference-Cited by-同舟云学术

Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering: A comparative study between Monte Carlo modelling and experiments

Published:2019-11 Issue: Volume:378 Page:125070
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Evrard Martin,Besnard Aurelien,Lucas Stephane

Funder

FEDER and 3DCOATER-5: Convention

Région Bourgogne Franche-Comté

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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