Author:
Carrère J-P.,Garnier P.,Desvoivres L.,Berthoud A.,Lunenborg M.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. Plasma‐charging damage: A physical model
2. Cost-effective cleaning and high-quality thin gate oxides
3. G. Ribes, S. Bruyère, M. Denais, D. Roy, G. Ghibaudo “MVHR (Multi-Vibrational Hydrogen Release): Consistency With Bias Temperature Instability and Dielectrics Breakdown” in IRPS (2005) 377-380.
Cited by
5 articles.
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